Precision Motion Control Design and Implementation 2nd Edition

Precision Motion Control focuses on enabling technologies for precision engineering – issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system. The second edition has been edited and rewritten throughout with the following particular areas being expanded or added: – piezoelectric actuators; – fine movement control; – gantry-stage control; – interpolation of quadrature encoder signals; – geometrical error modelling for single-, dual- and general-XY-axis stages. By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter, accessible to a broad base of readers, ranging from academics to practitioners, is provided.