This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas
Advanced Technologies Based on Wave and Beam Generated Plasmas 1st Edition
Author(s): H. Schlüter; ‎A. Shivarova
Publisher: Springer
ISBN: 9780792356424
Edition: 1st Edition
$39,99
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